SUSS MicroTec and DELO announce collaboration on imprint lithography 15 September 2020

SUSS MicroTec, supplier of equipment and process solutions for the semiconductor industry, has announced a cooperation with DELO to focus on the development and qualification of enhanced process solutions for micro-imprint lithography applications, especially the interaction of equipment and materials.

The use of imprint lithography has become indispensable in the field of data communications, autonomous driving, lighting, medical and consumer electronics. It is emerging as a key technology for many booming applications such as face recognition, light carpets and augmented reality. Due to rapid technological developments in these areas, the need for industrial level robust manufacturing solutions is growing.

The technological solutions arising from this cooperation will be accessible to customers via the SUSS Imprint Excellence Center in Neuchâtel, Switzerland, a combined effort of SUSS MicroTec and SUSS MicroOptics. In addition to clean rooms and imprint equipment, the infrastructure in Neuchâtel provides access to an experienced workforce with extensive optics and process expertise and established supply chain relationships.

The alignment between the equipment and the materials used, such as the polymer adhesives for micro-imprinting, is a core component of the cooperation. To this end, DELO light curing products are already integrated in the latest generation of SUSS imprint systems, offering users a perfect match between the curing unit and the materials to be cured.

"The synergies between material and equipment manufacturers are of great importance in the further development of key technologies and their transfer to series production, especially in today's world," comments Franz Richter, CEO and chairman of the management board of SUSS MicroTec. "In-depth knowledge of each other's products and the ability to closely coordinate them form the basis of a fruitful partnership. Reliability and competence play an equally important role. We are looking forward to developing future-oriented imprint solutions and technologies together with a strong and experienced partner like DELO."

Robert Saller, managing director of DELO, also commented: “With an excellence centre and its experienced partners for every aspect of wafer-level optics processes, SUSS MicroTec has created a premium offering for manufacturers of consumer and automotive electronics. It will significantly reduce their learning curves and enable a faster entry into the market. As the interplay of imprint material, processing technology and curing equipment is pivotal for reducing costs and increasing output, we are excited to contribute our strong expertise in materials and processes for wafer level optics.”

Claire Aldridge Deputy Editor t: +44 (0) 1727 743 889

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